Direct fabrication of all-inorganic logic elements and microelectromechanical systems from nanoparticle precursors

Materials Research Society Symposium - Proceedings

Volumn 636, Issue , 2001, Pages

  Bulthaup, C ^a   Wilhelm, E ^a   Hubert, B ^a   Ridley, B ^a   Jacobson, J ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; LOGIC DEVICES; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; POLYMERS;

LIQUID EMBOSSING; NON-LITHOGRAPHIC PATTERNING; SUB-MICRON RESOLUTION;

ELECTROSTATIC DEVICES;

EID: 0034818906     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (31)