Modelling and analysis of UV laser micromachining of copper

International Journal of Advanced Manufacturing Technology

Volumn 18, Issue 5, 2001, Pages 323-331

  Zhang, W ^a   Yao, Y L ^a   Chen, K ^a  

^a Department of Earth and Environmental Sciences   (United States)

Author keywords

Ablation; UV laser micromachining

Indexed keywords

BOUNDARY CONDITIONS; COMPUTER SIMULATION; COPPER; ENTHALPY; INTERFACES (MATERIALS); LASER BEAM EFFECTS; MATHEMATICAL MODELS; NEODYMIUM LASERS; PROCESS ENGINEERING;

LASER BEAM DISTRIBUTION; LASER MICROMACHINING; NANOSECOND TIME SCALE LASERS; THERMAL VAPORISATION;

MICROMACHINING;

EID: 0034813538     PISSN: 02683768     EISSN: None     Source Type: Journal    
DOI: 10.1007/s001700170056     Document Type: Article

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