Application of an adaptive neuro-fuzzy inference system for the optimal analysis of chemical-mechanical polishing process parameters

International Journal of Advanced Manufacturing Technology

Volumn 18, Issue 1, 2001, Pages 20-28

  Lin, Z C ^a   Liu, C Y ^a  

^a NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Adaptive neuro fuzzy inference system (ANFIS); Chemical mechanical polishing (CMP); Neuro fuzzy

Indexed keywords

ADAPTIVE ALGORITHMS; ADAPTIVE SYSTEMS; CHEMICAL MECHANICAL POLISHING; FUZZY CONTROL; INFERENCE ENGINES; MACHINING; NEURAL NETWORKS; OPTIMIZATION; PARAMETER ESTIMATION; SEMICONDUCTOR DEVICE MANUFACTURE; SURFACE ROUGHNESS;

ADAPTIVE NEUROFUZZY INFERENCE SYSTEMS; WAFER FLATTENING;

COMPUTER AIDED MANUFACTURING;

EID: 0034802832     PISSN: 02683768     EISSN: None     Source Type: Journal    
DOI: 10.1007/s001700170090     Document Type: Article

References (7)

1. The research of Taguchi method with fuzzy strategy on die polishing parameters analysis
2. Neural-Taguchi method for robust design analysis
3. Application of chemical mechanical polishing to the fabrication of VLSI circuit interconnections
4. A study of chemical mechanical polishing on silicon wafer
5. ANFIS: Adaptive-network-based fuzzy inference system