Wafer yield prediction by the Mahalanobis-Taguchi system

International Workshop on Statistical Metrology, Proceedings, IWSM

Volumn , Issue , 2001, Pages 25-28

  Asada, M ^a  

^a SHARP CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUIT MANUFACTURE; PRODUCTION CONTROL; SIGNAL TO NOISE RATIO; STATISTICS;

SEMICONDUCTOR CHIPS;

WSI CIRCUITS;

EID: 0034784147     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)

1. Total evaluation and SN ratio of multi-dimension information - Design of multi-dimension sensing system