Orientation control of KNbO3 thin film on silicon wafer with chemical solution deposition

Key Engineering Materials

Volumn 206-213, Issue II, 2001, Pages 1493-1496

  Suzuki, H ^a   Ohno, T ^a   Miyazaki, H ^a   Fu, D ^a   Ishikawa, K ^a   Kodaira, K ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

Author keywords

Chemical solution deposition; Orientation control; Potassium niobate; Thin film

Indexed keywords

ANNEALING; CRYSTAL ORIENTATION; DEPOSITION; PEROVSKITE; POTASSIUM COMPOUNDS; SILICON WAFERS;

CHEMICAL SOLUTION DEPOSITION;

THIN FILMS;

EID: 0034782589     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

References (10)