Active microvibration control of precision manufacturing factories with smart structure using piezoelectric actuators

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4330, Issue 1, 2001, Pages 449-459

  Fujita, Takafumi ^a   Enomoto, Masahito ^a   Arikabe, Takeo ^b   Ogawa, Tomohiro ^b   Murai, Nobuyoshi ^c   Hashimoto, Yoshiyuki ^c   Hamaguchi, Hiroki ^c   Kitahara, Takashi ^d  

^a UNIVERSITY OF TOKYO   (Japan)

^b SUMITOMO HEAVY INDUSTRIES LTD   (Japan)

^c TAKENAKA CORPORATION   (Japan)

^d HITACHI LTD   (Japan)

Author keywords

H infinity control; Microvibration; Piezoelectric actuator; Semiconductor manufacturing factory; Steel frame building; Vibration control

Indexed keywords

ACTUATORS; BEAMS AND GIRDERS; COLUMNS (STRUCTURAL); GROUND STATE; INTELLIGENT STRUCTURES; PIEZOELECTRIC MATERIALS; STEEL STRUCTURES; STRUCTURAL FRAMES;

MICROVIBRATIONS; PIEZOELECTRIC ACTUATORS;

VIBRATION CONTROL;

EID: 0034779767     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.434145     Document Type: Article

References (3)

1. Application of large scale active microvibration control system using piezoelectric actuators to semiconductor manufacturing equipment
2. Smart structures for active vibration control of buildings
3. Active vibration control of frame structures with smart structures using piezoelectric actuators (Vibration control by control of bending moments of columns)