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Volumn 17, Issue 3, 2001, Pages 193-200
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Monitoring nitride layer growth using magnetic sensor
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Author keywords
[No Author keywords available]
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Indexed keywords
AMMONIA;
COERCIVE FORCE;
DIFFUSION;
MAGNETIC PERMEABILITY;
NITROGEN;
NUCLEATION;
PHASE COMPOSITION;
PHASE TRANSITIONS;
PROCESS CONTROL;
REACTION KINETICS;
SENSORS;
DISSOCIATED AMMONIA;
ELECTROMAGNETIC PROPERTIES;
MAGNETIC SENSOR;
NITRIDE LAYER;
NITRIDING;
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EID: 0034774277
PISSN: 02670844
EISSN: None
Source Type: Journal
DOI: 10.1179/026708401101517791 Document Type: Article |
Times cited : (9)
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References (34)
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