Improving the measurement algorithm for alignment

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4344, Issue , 2001, Pages 572-582

  Nakajima, S ^a   Kanaya, Y ^a   Takahashi, A ^a   Yoshida, K ^a   Mizutani, H ^a  

^a NIKON CORPORATION   (Japan)

Author keywords

Alignment; Filter bank; Interpolation; Measurement algorithm; Stepper; Symmetry; Wavelet transform

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; EDGE DETECTION; INTERPOLATION; WAVELET TRANSFORMS;

MEASUREMENT ALGORITHMS;

IMAGE PROCESSING;

EID: 0034768951     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.436780     Document Type: Conference Paper

References (9)

1. A mathematical theory of communication
2. Communication in the presence of noise
3. The shannon sampling theorem-its various extensions and applications: A tutorial review
4. Exact interpolation of bandlimited functions
5. Certain topics in telegraph transmission theory
6. Decomposition of hardy functions into square integrable wavelets of constant shape
7. Intermediate spaces and interpolation, the complex method