Luminescent materials for EUV detection purposes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4343, Issue 1, 2001, Pages 665-675

  Kroon, Mark ^a   Stuik, Remko ^b  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

^b FOM INSTITUTE FOR PLASMA PHYSICS RIJNHUIZEN   (Netherlands)

Author keywords

Deep UV; Detection; Efficiency; Extreme UV; Luminescence; Phosphors

Indexed keywords

CRYSTALLINE MATERIALS; ELECTRIC EXCITATION; PHOSPHORS; PHOTOLITHOGRAPHY; PHOTOLUMINESCENCE; POLISHING; SIGNAL TO NOISE RATIO; SINGLE CRYSTALS; SPECTROSCOPIC ANALYSIS; SUBSTRATES; SURFACE REACTIONS; THIN FILMS; VAPOR DEPOSITION;

LUMINESCENT MATERIALS;

ULTRAVIOLET DETECTORS;

EID: 0034768496     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.436636     Document Type: Article

References (5)