Haidinger interferometer for silicon wafer TTV measurement

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4344, Issue 1, 2001, Pages 496-505

  Parks, Robert E ^a,c   Shao, Lianzhen ^b   Davies, Angela ^c   Evans, Christopher J ^c  

^a Optical Perspectives Group LLC   (United States)

^b Tucson Optical Research Corporation   (United States)

^c NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Haidinger interferometer; Interferometry; Phase shifting interferometry; Silicon wafer measurement; TTV

Indexed keywords

CHARGE COUPLED DEVICES; INTERFEROMETERS; PHASE SHIFT; SEMICONDUCTOR LASERS;

PHASE SHIFTING INTERFEROMETRY;

SILICON WAFERS;

EID: 0034765760     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.436775     Document Type: Article

References (3)