SCOPUS 정보 검색 플랫폼

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4343, Issue 1, 2001, Pages 646-653

Flatness correction of NZTE mask blank substrates

(6) Aschke, Lutz a Schubert, Fredi a Kegeler, Joerg a Schindler, Axel b Haensel, Thomas b Knapp, Konrad a

a SCHOTT AG (Germany)

b LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM (Germany)

Author keywords

EUVL; Flatness; IBF; Mask Blanks; NZTE Material; Roughness; ULE ; ZERODUR

Indexed keywords

ATOMIC FORCE MICROSCOPY; ERROR CORRECTION; INTERFEROMETRY; ION BEAMS; NATURAL FREQUENCIES; PHOTOLITHOGRAPHY; POLISHING; SUBSTRATES; SURFACE ROUGHNESS; THERMAL EXPANSION; THERMODYNAMIC STABILITY; ULTRAVIOLET RADIATION;

FLATNESS CORRECTION;

MASKS;

EID: 0034758360 PISSN: 0277786X EISSN: None Source Type: Journal
DOI: 10.1117/12.436634 Document Type: Article

Times cited : (5)

References (5)

1
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- Specification for extreme ultraviolet lithography mask substrates
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- (1981) Semiconductor Equipment and Materials International

2
- 84994430135
- Mask substrate requirements and development for extreme ultraviolet lithography (EUVL)
- Monterey, CA, Sept 15 -17, Preprint UCRL-JC-135884, Lawrence Livermore National Lab
- (1999) th Annual BACUS Symp. On Photomask Technology and Management
- Tong, W.M.¹ Taylor, J.S.² Hector, S.D.³ Shell, M.⁴

3
- 0000817861
- Precision optics manufacturing using magnetorheological finishing (MRF)
- Y. Furukawa, Y. Mori & T. Kataoka (Eds.), © The Japan Soc. for Precision Engineering, Tokyo
- (1999) Precision Science and Technology for Perfect Surfaces , pp. 132-137
- Golini, D.¹

4
- 0000527070
- Nanometer precision (reactive) ion beam figuring of (aspherical) optical surfaces
- Y. Furukawa, Y. Mori, T. Kataoka, (Eds.), © The Japanese Society for Precision Engineering, Tokyo
- (1999) Precision Science and Technology for Perfect Surfaces , pp. 243-248
- Schindler, A.¹ Haensel, T.² Flamm, D.³ Nickel, A.⁴ Thomas, H.-J.⁵ Bigl, F.⁶

5
- 0000045872
- Sub - Nanometer polishing of optical surfaces by ion beam planarization technique
- Y. Furukawa, Y. Mod & T. Kataoka (Eds.), © The Japan Soc. for Precision Engineering, Tokyo
- (1999) Precision Science and Technology for Perfect Surfaces , pp. 249-254
- Fechner, R.¹ Schindler, A.² Haensel, T.³ Bigl, F.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.