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Volumn 174, Issue 1-2, 2000, Pages 213-220
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High temperature gas and plasma transport properties of F2 and CF4 mixtures
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Author keywords
Mixtures; Theoretical method; Thermal conductivity; Viscosity
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Indexed keywords
CARBON TETRAFLUORIDE;
DIFLUOROMETHANE;
FLUORINATED HYDROCARBON;
FLUORINE;
UNCLASSIFIED DRUG;
ACCURACY;
CALCULATION;
CONFERENCE PAPER;
DISSOCIATION;
DRUG MIXTURE;
IONIZATION;
MODEL;
REACTION ANALYSIS;
TECHNIQUE;
TEMPERATURE;
THEORY;
THERMAL CONDUCTIVITY;
TRANSPORT KINETICS;
DISSOCIATION;
FLUORINE;
FLUOROCARBONS;
IONIZATION OF GASES;
MATHEMATICAL MODELS;
PLASMA APPLICATIONS;
THERMAL CONDUCTIVITY OF GASES;
VISCOSITY OF GASES;
CHAPMAN-ENSKOG METHOD;
MIXTURES;
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EID: 0034714699
PISSN: 03783812
EISSN: None
Source Type: Journal
DOI: 10.1016/S0378-3812(00)00428-3 Document Type: Conference Paper |
Times cited : (7)
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References (17)
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