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Volumn 72, Issue 16, 2000, Pages 3875-3880
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Determination of main and minor components of silicon based materials by a combustion with elemental fluorine. Separation of gaseous fluorination products by carrier gas distillation and gas mass spectrometry
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Author keywords
[No Author keywords available]
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Indexed keywords
FLUORINE;
SILICON DERIVATIVE;
ARTICLE;
CHEMICAL ANALYSIS;
COMBUSTION;
DISTILLATION;
GAS;
MASS SPECTROMETRY;
MATERIALS;
MATERIALS TESTING;
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EID: 0034663230
PISSN: 00032700
EISSN: None
Source Type: Journal
DOI: 10.1021/ac991238c Document Type: Article |
Times cited : (2)
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References (21)
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