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note
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Polymers typically suffer damage from interaction with a high current density electron beam in the form of molecular scission or cross-linking, thereby altering the microstructure of the illuminated area. Additionally, although the size of the electron beam probe used here was approximately 1 nm in diameter (fwhm of a Gaussian profile), the beam polymerizes hydrocarbons present in the microscope onto the sample, resulting in a buildup of carbonaceous contamination on the illuminated area. This effectively increases the probe diameter during exposure because the contamination causes the beam to broaden before reaching the sample.
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