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Volumn , Issue , 2000, Pages 37-41
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A table-based time-domain simulation method for oversampled microelectromechanical systems
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Author keywords
[No Author keywords available]
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Indexed keywords
MACROMODELS;
ACCELEROMETERS;
ALGORITHMS;
APPROXIMATION THEORY;
BOUNDARY ELEMENT METHOD;
CLOSED LOOP CONTROL SYSTEMS;
COMPUTER SIMULATION;
DELTA SIGMA MODULATION;
ELECTROMAGNETIC FIELDS;
FEEDBACK CONTROL;
FINITE DIFFERENCE METHOD;
FINITE ELEMENT METHOD;
INTERPOLATION;
MICROACTUATORS;
ORDINARY DIFFERENTIAL EQUATIONS;
PARTIAL DIFFERENTIAL EQUATIONS;
SEMICONDUCTOR DEVICES;
MICROELECTROMECHANICAL DEVICES;
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EID: 0034593268
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/BMAS.2000.888362 Document Type: Conference Paper |
Times cited : (3)
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References (6)
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