Improvement of ultra-fine piercing by vacuum system

Proceedings of the International Symposium on Micro Machine and Human Science

Volumn , Issue , 2000, Pages 77-82

  Mori, Toshihiko ^a   Hirota, Kenji ^a   Tokumoto, Daisuke ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM FOIL; BERYLLIUM ALLOYS; CERAMIC FIBERS; SILICON CARBIDE; VACUUM APPLICATIONS;

BERYLLIUM COPPER ALLOY; ULTRA-FINE PIERCING;

PIERCING;

EID: 0034590097     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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2. T.Sato, T.Masuzawa, M.Fujino, Y.Onishi, "Application of WEDG for Microdrilling and Microendmilling", Proc. of Annual Spring Assembly of JSPE (1989) 1091-1092 (In Japanese)
3. H.K.Tönshoff, D.Hesse, H.Kappel, J.Mommsen, "Excimer Laser Systems, Manufacturing Systems", 24, 5 (1995) 395-409
4. P.-H.'s Herren, C.Beuret, O.Larsson, A. Bertholds, "Microstructuring of Silicon by Electro-discharge Machining(EDM) -part II Applications", Proc. of Eurosensors X (1996) 255-258
5. T.Masuzawa, M.Yamamoto, M.Fujino, "A Micropunching System Using Wire-EDG and EDM", Proc. of ISEM IX (1989) 86-90
6. T.Mori, K.Nakashima, D.Tokumoto, "Ultra-fine Piercing by SiC Fiber Punch", Proc. of MHS'98 (1998) 51-56