Novel positive-type photosensitive polyimide coatings "PW-1000"

Journal of Photopolymer Science and Technology

Volumn 13, Issue 2, 2000, Pages 357-360

  Tomikawa, Masao ^a   Suwa, Mitsuhito ^a   Yoshida, Satoshi ^a   Fujita, Yoji ^a   Okuda, Ryoji ^a   Ohbayashi, Gentaro ^a  

^a TORAY INDUSTRIES INC   (Japan)

Author keywords

Adhesion; Heat stability; Plasma resistance; Polyimide; Resolution

Indexed keywords

POLYIMIDE;

ADHESION; ARTICLE; OPTICAL RESOLUTION; PHOTOGRAPHY; PHOTOSENSITIVITY; THERMOSTABILITY;

EID: 0034584059     PISSN: 09149244     EISSN: None     Source Type: Journal    
DOI: 10.2494/photopolymer.13.357     Document Type: Article

References (1)