Research and development of production control information system tool

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue 1, 2000, Pages 351-354

  Ishii, Yoshiriho ^a   Watanabe, Shizu ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MANAGEMENT INFORMATION SYSTEMS; PRODUCTION CONTROL; REAL TIME SYSTEMS; RESEARCH AND DEVELOPMENT MANAGEMENT;

PRODUCTION CONTROL INFORMATION SYSTEM TOOLS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0034583839     PISSN: 1523553X     EISSN: None     Source Type: Journal    
DOI: 10.1109/ISSM.2000.993685     Document Type: Article

References (4)

1. TSS: A daily production target setting system for foundry fabs