Statistical analysis and design of semiconductor manufacturing systems

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue 1, 2000, Pages 335-338

  Chen, Argon ^a   Guo, R S ^a   Lin, Puffy ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Manufacturing control; Robust design; Statistical process control

Indexed keywords

COMPUTER SIMULATION; INTEGRATED CIRCUIT LAYOUT; MATHEMATICAL MODELS; QUALITY CONTROL; QUEUEING NETWORKS;

MANUFACTURING CONTROL;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0034583827     PISSN: 1523553X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. A time series approach to queuing systems with applications for modeling job-shop in-process inventories