Gas-sensing properties of PdO-modified SnO2-Fe2O3 double-layer thin-film sensor prepared by PECVD technique

Vacuum

Volumn 59, Issue 4, 2000, Pages 877-884

  Tong, M S ^a   Dai, G R ^a   Gao, D S ^a  

^a JILIN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; CHEMICAL SENSORS; IRON OXIDES; MORPHOLOGY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES; SURFACE TREATMENT; THIN FILMS; TIN COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

PALLADIUM OXIDE; TIN DIOXIDE;

SEMICONDUCTING FILMS;

EID: 0034561598     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(00)00395-X     Document Type: Article

References (9)

1. Gentry S.J., Jones T.A. Sensors and Actuators. 10:1986;141.
2. Kohl D. Sensors and Actuators. B1:1990;158.
3. Demarne V., Grised A. Sensors and Actuators. 13:1988;301.
4. Anderson J.C. J Vac Sci Technol. A4(3):1986;610.
5. Mukherjee S.P., Evans P.E. Thin Solid Films. 14:1972;105.
6. Morrison S.R. Sensors and Actuators. 12:1987;425.
7. Jiang L.Q., Koel B.E. Surf. Sci. 273:1992;273.
8. Semancik S., Fryberger T.B. Sensors and Actuators. B1:1990;97.
9. Huck R., Bottger U., Kohl K., Heiland G. Sensors and Actuators. 17:1983;355.