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Volumn 4180, Issue , 2000, Pages 6-15
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Bulk micromachining for sensors and actuators
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
ELECTROSTATICS;
GYROSCOPES;
MASS TRANSFER;
MICROACTUATORS;
MICROMACHINING;
MICROSENSORS;
MULTILAYERS;
QUARTZ;
REACTIVE ION ETCHING;
SHAPE MEMORY EFFECT;
SILICON WAFERS;
CATHETER TIP SENSORS;
FIBER OPTIC SENSORS;
LEAD COMPOUNDS;
MICROELECTROMECHANICAL DEVICES;
SILICON CARBIDE;
CHEMICAL BONDS;
ETCHING;
PIEZOELECTRIC MATERIALS;
SILICON;
CATHETERS;
PIEZOELECTRIC DEVICES;
ELECTRIC BREAKDOWN OF SOLIDS;
Q FACTOR MEASUREMENT;
NEAR-FIELD SCANNING OPTICAL MICROSCOPY (NSOM);
QUARTZ CRYSTAL MICROBALANCE (QCM);
SCANNING PROBE MICROSCOPY (SPM);
SCANNING PROBE MICROSCOPY;
BULK MICROMACHINING;
GLASS-SILICON ANODIC BONDING;
ELECTROSTATICALLY LEVITATING MICROMOTOR;
ELECTROSTATIC MICROACTUATORS;
MICROFABRICATION;
MICROELECTROMECHANICAL DEVICES;
MICROMACHINING;
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EID: 0034548120
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.395705 Document Type: Conference Paper |
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Times cited : (2)
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References (40)
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