Straightness measurement of a moving table by using laser beams

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4093, Issue , 2000, Pages 47-57

  Tenjimbayashi, Koji ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ERROR ANALYSIS; MATRIX ALGEBRA; MIRRORS;

CORNER CUBE MIRRORS; ROTATION ANGLE ERRORS; TWO-PARALLEL DISPLACEMENT ERRORS;

LASER BEAMS;

EID: 0034543654     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.405228     Document Type: Conference Paper

References (3)