Micromachining technologies for Capillary Electrophoresis utilizing Pyrex glass etching and bonding

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4174, Issue 1, 2000, Pages 356-362

  Zhang, Jian ^a   Gong, Thomas Haiqing ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Agitation; Capillary Electrophoresis (CE); Glass etching and bonding; HF based etchant

Indexed keywords

AMORPHOUS SILICON; BONDING; ELECTROPHORESIS; ETCHING; GLASS; MICROELECTROMECHANICAL DEVICES; PHOTORESISTS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

CAPILLARY ELECTROPHORESIS;

MICROMACHINING;

EID: 0034543562     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.396454     Document Type: Article

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