Optical properties of a polyimide for waveguide applications in on-chip interconnects

Materials Research Society Symposium - Proceedings

Volumn 597, Issue , 2000, Pages 125-129

  Agarwal, N ^a   Huang, X ^a   Persans, P ^a   Plawsky, J ^a   Ponoth, S ^a   Zhang, X ^a   Murarka, S ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; LIGHT ABSORPTION; LIGHT SCATTERING; OPTICAL INTERCONNECTS; POLYIMIDES; REFRACTIVE INDEX; THIN FILMS;

COUPLING ANGLE; ON CHIP INTERCONNECTS; OPTICAL LOSSES;

OPTICAL WAVEGUIDES;

EID: 0034542929     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

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3. H. Taylor, A. Yariv, Proceedings of the IEEE 62, 1044 (1974)
4. A. Beuhler, D. Wargowski, T. Kowalczyk and K. Singer in Optoelectronic Interconnects, edited by R. Chen (SPIE Proc. 1849, 1993) pp. 92-101
5. L. Robitaille, C. Callender, J. Noad, IEEE Photonics Technology Letters 8, 1647 (1990)