MEMS device for mass market gas and chemical sensors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4176, Issue , 2000, Pages 180-187

  Kinkade, Brian R ^a   Daly, James T ^a   Johnson, Edward A ^a  

^a Ion Optics Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR QUALITY; CHEMICAL SENSORS; ENERGY GAP; INTEGRATED CIRCUIT MANUFACTURE; MICROELECTROMECHANICAL DEVICES; SILICON SENSORS;

TOXIC GAS DETECTION;

MICROSENSORS;

EID: 0034538740     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.395626     Document Type: Conference Paper

References (12)