Electrical and environmental reliability characterization of surface micromachined MEMS polysilicon test structures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4180, Issue 1, 2000, Pages 91-95

  White, Carolyn ^a   Shea, Herb ^a   Cameron, Kim ^a   Pardo, Flavio ^a   Bolle, Cristian ^a   Aksyuk, Vladimir ^a   Arney, Susanne ^a  

^a NOKIA RESEARCH CENTER   (United States)

Author keywords

Humidity; Leakage current; MEMS reliability; Polysilicon; Resistivity; Surface micromachining

Indexed keywords

ELECTRIC CONDUCTIVITY OF SOLIDS; FAILURE ANALYSIS; LEAKAGE CURRENTS; MICROMACHINING; ROBUSTNESS (CONTROL SYSTEMS); SUBSTRATES; THIN FILMS;

POLYSILICON; SURFACE MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 0034538714     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.395697     Document Type: Article

References (0)