New fabrication techniques for high dynamic range tunneling sensors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4176, Issue 1, 2000, Pages 68-73

  Chang, D T ^a   Stratton, F P ^a   Kubena, R L ^a   Vickers Kirby, D J ^a   Joyce, R J ^a   Schimert, T ^a,b   Gooch, R W ^a,b  

^a Hughes Aircraft Co   (United States)

^b RAYTHEON COMPANY   (United States)

Author keywords

Bulk micromachining; Surface micromachining; Surface mount electronics; Tunneling sensors; Wafer level packaging

Indexed keywords

ACCELEROMETERS; ELECTRONICS PACKAGING; MICROMACHINING; MICROPHONISM; MICROPROCESSOR CHIPS; SURFACE MOUNT TECHNOLOGY;

BULK MICROMACHINING; TUNNELING SENSORS;

SILICON SENSORS;

EID: 0034538632     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.395643     Document Type: Article

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