Planar optical waveguide thin films grown by microwave ECR PECVD

Surface and Coatings Technology

Volumn 131, Issue 1-3, 2000, Pages 116-120

  Zhang, Jinsong ^a   Ren, Zhaoxing ^a   Liang, Rongqing ^a   Sui, Yifeng ^a   Liu, Wei ^a  

^a INSTITUTE OF PLASMA PHYSICS   (China)

Author keywords

Microwave ECR PECVD; Planar optical waveguide; Thin film

Indexed keywords

OPTICAL TECHNIQUE;

EID: 0034531550     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)00748-9     Document Type: Article

References (11)