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Volumn 71, Issue 6, 2000, Pages 647-650

Method to pattern Pd over-layers on GdMg films and its application to increase the transmittance of metal hydride optical switches

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CATALYSIS; ETCHING; GADOLINIUM ALLOYS; HYDRIDES; MASKS; METALLIC FILMS; OPTICAL SWITCHES; PHOTOLITHOGRAPHY; SPUTTERING; TUNGSTEN COMPOUNDS;

ION MILLING; TUNGSTEN TRIOXIDE MASKS; WET ETCHING;

PALLADIUM;

EID: 0034515392 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s003390000582 Document Type: Article

Times cited : (4)

References (12)

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