Field-emission enhancement of Mo-tip field-emitted arrays fabricated by using a redox method

IEEE Electron Device Letters

Volumn 21, Issue 12, 2000, Pages 560-562

  Lin, C M ^a   Chang, S J ^a   Yokoyama, M ^a   Lin, I Nan ^b   Chen, J F ^a   Huang, B R ^c  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^c NATIONAL YUNLIN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; MOLYBDENUM; REDOX REACTIONS; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

TURN-ON VOLTAGE;

ELECTRON EMISSION;

EID: 0034513243     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.887465     Document Type: Article

References (8)

1. J. T. Trujillo and C. E. Hunt, "Fabrication of gated silicon field-emission cathodes for vacuum micro electronics and electron-beam applications," J. Vac. Sci. Technol. B, vol. 11, pp. 454-458, 1993.
2. C. A. Spindt, C. E. Holland, A. Rosengreen, and I. Brodie, "Field-emitter-array development for high-frequency operation," J. Vac. Sci. Technol. B, vol. 11, pp. 468-473, 1993.
3. H. P. Chang, D. P. Kern, and L. P. Muray, "Miniature electron-optical columns," IEEE Trans. Electron Devices, vol. 38, pp. 2284-2288, 1991.
4. H. H. Busta, J. E. Pogemiller, and B. J. Zimmerman, "The field emittertriode as a displacement/pressure sensor," J. Micromech. Microeng., vol. 3, pp. 49-56, 1993.
5. N. Y. Lee et al., "The influence of ambient gases on the emission characteristics of Mo-FEA's during the frit-sealing cycle," in Proc. SID Dig., 1999, pp. 584-587.
6. C. A. Spindt, I. Brodie, L. Humphrey, and E. R. Westerberg, "Physical properties of thin-film field emission cathodes with molybdenum cones," J. Appl. Phys., vol. 47, pp. 5248-5263, 1976.
7. H. H. Busta, J. E. Pogemiller, and B. J. Zimmerman, "Collector-assisted operation of micro machined field-emitter triode," IEEE Trans. Electron Devices, vol. 40, pp. 1537-1541, 1993.
8. G. N. A. van Veen, "Space-charge effects in Spindt-type field emission cathodes," J. Vac. Sci. Technol. B, vol. 12, pp. 655-661, 1994.