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Volumn 111, Issue 11, 2000, Pages 509-513

Study on wide beam curved optical axes focusing for magnetic immersed lenses without crossovers

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON OPTICS; IMAGE ANALYSIS; MAGNETIC FLUX; MATHEMATICAL MODELS; RAY TRACING;

EID: 0034510505     PISSN: 00304026     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (7)

References (9)
  • 1
    • 0000651403 scopus 로고    scopus 로고
    • Space charge effects in projection charge particle lithography systems
    • Harriott LR et al.: Space Charge Effects in Projection Charge Particle Lithography Systems. J. Vac. Sci. Technol. B14 (1996) 3782
    • (1996) J. Vac. Sci. Technol. , vol.B14 , pp. 3782
    • Harriott, L.R.1
  • 4
    • 1942515450 scopus 로고
    • Elektronen- und ionen optik
    • Springer-Verlag, Berlin
    • Glaser W: Elektronen- und Ionen Optik. In: Handbuch der Physik. B33, Springer-Verlag, Berlin 1956
    • (1956) Handbuch der Physik , vol.B33
    • Glaser, W.1
  • 5
    • 0004065834 scopus 로고    scopus 로고
    • Beijing Institute of Technology Press, 1st Edition, March in Chinese
    • Tang T: Advanced Electron Optics. Beijing Institute of Technology Press, 1st Edition, March 1996 (in Chinese)
    • (1996) Advanced Electron Optics
    • Tang, T.1
  • 8
    • 0022583310 scopus 로고
    • Computer aided design of magnetic deflection system
    • Osseyran A: Computer Aided Design of Magnetic Deflection System. Philips Journal. Research. 41 suppl. 1 (1986) 1-151
    • (1986) Philips Journal. Research , vol.41 , Issue.SUPPL. 1 , pp. 1-151
    • Osseyran, A.1
  • 9
    • 0009110326 scopus 로고
    • Magnetic field calculation and the determination of electron trajectories
    • Hawkes PW (Ed.): Springer-Verlag, Berlin
    • Kasper E: Magnetic Field Calculation and the Determination of Electron Trajectories. In Hawkes PW (Ed.): Magnetic Electron Lenses. Springer-Verlag, Berlin 1982
    • (1982) Magnetic Electron Lenses
    • Kasper, E.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.