Technique of microfabrication suitable for machining submillimeter wave components

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4088, Issue , 2000, Pages 144-147

  Liu, W Y ^a   Steenson, D P ^a   Steer, M B ^a  

^a UNIVERSITY OF LEEDS   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC LOSSES; INTEGRATED CIRCUIT MANUFACTURE; MICROMACHINING; PHOTORESISTS; RECTANGULAR WAVEGUIDES; SEMICONDUCTOR DEVICE STRUCTURES;

MICROFABRICATION;

PULSED LASER APPLICATIONS;

EID: 0034506232     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.405741     Document Type: Conference Paper

References (1)