Development of a microrobot-based micromanipulation cell in a scanning electron microscope (SEM)

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4194, Issue , 2000, Pages 129-140

  Schmoeckel, Ferdinand ^a   Fahlbusch, Stephan ^a   Seyfried, Joerg ^a   Buerkle, Axel ^a   Fatikow, Sergej ^a  

^a UNIVERSITY OF KARLSRUHE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER CONTROL; ELECTRON BEAMS; FORCE CONTROL; MICROACTUATORS; MICROSCOPES; PIEZOELECTRIC DEVICES; ROBOTIC ASSEMBLY; SCANNING ELECTRON MICROSCOPY;

MICROMANIPULATION; MICROROBOTS; MICROTRIANGULATION; PIEZOELECTRIC ACTUATORS;

MANIPULATORS;

EID: 0034506123     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.403693     Document Type: Conference Paper

References (23)