On the mechanism of plasma enhanced dielectric deposition charging damage

International Symposium on Plasma Process-Induced Damage, P2ID, Proceedings

Volumn , Issue , 2000, Pages 161-163

  Cheung, Kin P ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; HIGH TEMPERATURE EFFECTS; LEAKAGE CURRENTS; PHOTOCONDUCTIVITY; PHOTOEMISSION; PHOTONS; POLYSILICON; SILICA;

PHOTOCONDUCTION; PLASMA ENHANCED DIELECTRIC DEPOSITION CHARGING DAMAGE;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 0034505305     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (12)