Optimizing the ellipsometric analysis of a transparent layer on glass

Surface and Interface Analysis

Volumn 29, Issue 12, 2000, Pages 845-850

  Tompkins, Harland G ^a   Smith, Steven ^a   Convey, Diana ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; GLASS; NITRIDES; OPTIMIZATION; REFRACTIVE INDEX; SUBSTRATES; TRANSPARENCY;

ANGLE OF INCIDENCE; TRANSPARENT LAYERS;

OPTICAL FILMS;

EID: 0034504877     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/1096-9918(200012)29:12<845::AID-SIA938>3.0.CO;2-Q     Document Type: Article

References (5)

1. Drude P. Ann. Phys. Chem. 1889; 36: 865.
2. Tompkins HG. A User's Guide to Ellipsometry. Academic Press: New York, 1993.
3. Tompkins HG, McGahan WA. Spectroscopic Ellipsometry and Reflectometry: a User's Guide. John Wiley: New York, 1999.
4. Aspnes DE. J. Opt. Soc. Am. 1974; 64: 639.
5. Jellison Jr, GE, Sales BC. Appl. Opt. 1991; 30: 4310.