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Volumn 4146, Issue , 2000, Pages 128-131

Compact debris shutter design of a laser-produced plasma source for high NA application

Author keywords

[No Author keywords available]

Indexed keywords

GYROSCOPES; MULTILAYERS; OPTICAL SHUTTERS; PHOTOLITHOGRAPHY; ULTRAVIOLET INSTRUMENTS;

EID: 0034504220     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.406664     Document Type: Conference Paper
Times cited : (2)

References (7)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.