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Volumn 4146, Issue , 2000, Pages 128-131
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Compact debris shutter design of a laser-produced plasma source for high NA application
a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
GYROSCOPES;
MULTILAYERS;
OPTICAL SHUTTERS;
PHOTOLITHOGRAPHY;
ULTRAVIOLET INSTRUMENTS;
COMPACT DEBRIS SHUTTER DESIGN;
EXTREME ULTRAVIOLET (EUV) INTERFEROMETER;
NUMERICAL APERTURE (NA);
LASER PRODUCED PLASMAS;
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EID: 0034504220
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.406664 Document Type: Conference Paper |
Times cited : (2)
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References (7)
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