Tantalum oxide dielectric for embedded capacitor applications

Proceedings of the IEEE International Conference on Properties and Applications of Dielectric Materials

Volumn 2, Issue , 2000, Pages 841-844

  Ang, Simon S ^a   Brown, W D ^a  

^a UNIVERSITY OF ARKANSAS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC OXIDATION; CAPACITANCE MEASUREMENT; CAPACITORS; ELECTRIC FIELD EFFECTS; ELECTRONICS PACKAGING; IONIC CONDUCTION; PERMITTIVITY; SPUTTER DEPOSITION; SUBSTRATES; TANTALUM COMPOUNDS;

EMBEDDED CAPACITORS; TANTALUM OXIDE;

DIELECTRIC MATERIALS;

EID: 0034501404     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)