Fundamentals of piezo-ceramic actuation for micrometer and sub-micrometer motions for the NanoWalker robot

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4194, Issue , 2000, Pages 82-93

  Martel, Sylvain ^a   Saraswat, Anant ^a   Hunter, Ian ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION; CERAMIC PRODUCTS; COMPUTER CONTROL; FRICTION; KINEMATICS; MICROACTUATORS; MOTION CONTROL; NATURAL FREQUENCIES; POSITION CONTROL;

MINIATURE ROBOTS; PIEZOCERAMIC ACTUATORS;

MOBILE ROBOTS;

EID: 0034499823     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.403688     Document Type: Conference Paper

References (0)