Micro/nanofactory: Concept and state of the art

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4194, Issue 1, 2000, Pages 1-12

  Breguet, Jean Marc ^a   Schmitt, Carl ^a   Clavel, Reymond ^a  

^a EPFL   (Switzerland)

Author keywords

MEMs; Micro manipulato; Microfactory; Microsystems; Nanofactory; Nanotechnology; Piezo actuato

Indexed keywords

ACTUATORS; MANIPULATORS; MICROELECTROMECHANICAL DEVICES;

MICROFACTORY; MICROSYSTEMS; NANOFACTORY; PIEZOACTUATORS;

NANOTECHNOLOGY;

EID: 0034498842     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.403687     Document Type: Article

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