Micromachined polysilicon resonating xylophone bar magnetometer: resonance characteristics

Materials Research Society Symposium - Proceedings

Volumn 605, Issue , 2000, Pages 211-216

  Lamb, J L ^a   Wickenden, D K ^a   Champion, J L ^a   Givens, R B ^a   Osiander, R ^a   Kistenmacher, T J ^a  

^a JOHNS HOPKINS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETIC FIELD EFFECTS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NATURAL FREQUENCIES; POLYSILICON; SCANNING ELECTRON MICROSCOPY; STIFFNESS; VIBRATIONS (MECHANICAL);

FLEXURAL MODE OF VIBRATION; MICROMACHINED POLYSILICON RESONATING XYLOPHONE BAR MAGNETOMETER; SUPPORT ARMS; TORSIONAL STIFFNESS;

MAGNETOMETERS;

EID: 0034498679     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. R. B. Givens, J. C. Murphy, R. Osiander, T. J. Kistenmacher, and D. K. Wickenden, Appl. Phys. Lett. 69, 2755 (1996).
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3. D. K. Wickenden, J. L. Champion, R. B. Givens, T. J. Kistenmacher, J. L. Lamb, and R. Osiander, SPIE Conf. Proc. Micromachined Devices & Components V 3876, 267 (1999).
4. W.C. Young, Roark s Formulas for Stress & Strain, Sixth Edition, (McGraw-Hill, New York, 1989).
5. Cronos Integrated Microsystems, Inc. (MCNC MEMS Technology Applications Center), 3021 Cornwallis Road, P. O. Box 12889, Research Triangle, NC 20779.
6. D. Sherman, "An Investigation of MEMS Anchor Design for Optimal Stiffness Damping," Master's Project, University of California, Berkeley, May 1996.