Direct measurement of electron beam scattering in the environmental scanning electron microscope using phosphor imaging plates

Scanning

Volumn 22, Issue 3, 2000, Pages 167-172

  Wight, S A ^a   Zeissler, C J ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Electron scattering; Environmental scanning electron microscope; Phosphor imaging plates; Photostimulable luminescence; Skirt

Indexed keywords

PHOSPHORUS;

ACCURACY; ARTICLE; ELECTRON BEAM; ELECTRON DIFFRACTION; LUMINESCENCE; MEASUREMENT; PHOTOSTIMULATION; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY;

ELECTRON BEAMS; ELECTRON SCATTERING; LUMINESCENCE; PHOSPHORS;

PHOTOSTIMULABLE LUMINESCENCE;

SCANNING ELECTRON MICROSCOPY;

EID: 0034493678     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950220304     Document Type: Article

References (13)

1. Variations in the probe beam broadening with operating conditions in ESEM: Monte-Carlo simulations and EDX measurements
2. Foundations of environmental scanning electron microscopy
3. Usefulness of floating radioluminography to tritiated samples
4. Quantitative secondary ion mass spectrometry of self-assembled monolayer films for electron beam dose mapping in the environmental scanning electron microscope
5. Usefulness of scanning laser stimulated luminescence (SLSL) system for electron microscopy - A new image recording system
6. Modeling the electron-gas interaction in low-vacuum SEMs
7. Improvement of precision in quantitative measurements of radioactivity with an imaging: Plate
8. Characteristics and correction of the fading of imaging plate
9. Photostimulated luminescence (PSL) and color-centers in BaFCl-Eu2+, BaFBr-Eu2+, BaFIEu2+ phosphors
10. Sensitivity and fading characteristics of the 25 μm pixel size imaging plate for transmission electron microscopes
11. Beam size in the environmental SEM: A comparison of model and experimental data
12. Detection and characterization of radioactive particles