Defect localization using physical design and electrical test information

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue , 2000, Pages 108-115

  Stanojevic, Zoran ^a   Balachandran, Hari ^a   Walker, D M H ^a   Lakhani, Fred ^a   Jandhyala, Sri ^a  

^a TEXAS A AND M UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED MANUFACTURING; CRYSTAL DEFECTS; FAILURE ANALYSIS;

COMPUTER AIDED FAULT TO DEFECT MAPPING (CAFDM); DEFECT LOCALIZATION;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0034483473     PISSN: 10788743     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)