Epitaxy-ready reflecting substrates for resonant-cavity-enhanced silicon photodetectors

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

Volumn 2, Issue , 2000, Pages 432-433

  Emsley, Matthew K ^a   Selim Unlu, M ^a  

^a BOSTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; LIGHT ABSORPTION; QUANTUM EFFICIENCY; SEMICONDUCTING SILICON; SUBSTRATES;

EPITAXY READY REFLECTING SUBSTRATE; RESONANT CAVITY ENHANCED SILICON PHOTODETECTOR; SEPARATION BY IMPLANTATION OF OXYGEN;

PHOTODETECTORS;

EID: 0034482904     PISSN: 10928081     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)