Managing arsenic in GaAs fab wastewater

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue , 2000, Pages 187-192

  Peterson, Joel ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARSENIC; CONTAMINATION; REGULATORY COMPLIANCE; SEMICONDUCTING GALLIUM ARSENIDE; WASTEWATER DISPOSAL; WASTEWATER TREATMENT;

MAXIMUM CONTAMINANT LEVEL;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0034481446     PISSN: 10788743     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)