SCOPUS 정보 검색 플랫폼

Journal of the American Society for Mass Spectrometry

Volumn 11, Issue 7, 2000, Pages 650-658

Investigation of the formation process of MCs+-molecular ions during sputtering

(5) Vlekken, Johan a D'Olieslaeger, Marc a Knuyt, Gilbert a Vandervorst, Wilfried b De Schepper, Luc a

a HASSELT UNIVERSITY (Belgium)

b IMEC (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

BINDING ENERGY; ION BOMBARDMENT; MONTE CARLO METHODS;

VELOCITY DISTRIBUTION;

MASS SPECTROMETRY;

CESIUM ION;

COATING; ION; ION BOMBARDMENT; SPUTTERING; VELOCITY;

ARTICLE; CALCULATION; ENERGY; IONIZATION; MASS SPECTROMETRY; MONTE CARLO METHOD; PROBABILITY; SURFACE PROPERTY;

EID: 0034480638 PISSN: 10440305 EISSN: None Source Type: Journal
DOI: 10.1016/S1044-0305(00)00130-6 Document Type: Article

Times cited : (6)

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