Preparation and characterization of organic-inorganic hybrid materials via sol-gel reaction for interlayer dielectrics

Molecular Crystals and Liquid Crystals Science and Technology Section A: Molecular Crystals and Liquid Crystals

Volumn 349, Issue , 2000, Pages 263-266

  Baek, Nam Seob ^a   Song, Young Bae ^a   Kim, Hwan Kyu ^a   Hwang, Seung Sang ^b   Hong, Soon Man ^b  

^a Hannam University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSIS; DIELECTRIC MATERIALS; GLASS; HEAT RESISTANCE; INDIUM COMPOUNDS; MULTILAYERS; PERMITTIVITY; PYROLYSIS; SOL-GELS; THERMAL EXPANSION;

INTERLAYER DIELECTRICS; POLYHYDROXYIMIDES; TETRAETHOXYSILANE; THERMAL EXPANSION COEFFICIENT; TRIETHOXYSILYLPROPYL ISOCYANATE;

POLYIMIDES;

EID: 0034480249     PISSN: 1058725X     EISSN: None     Source Type: Journal    
DOI: 10.1080/10587250008024915     Document Type: Article

References (4)

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