Implementation of best known methods

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue , 2000, Pages 181-186

  Foster, Jason ^a   Nugent, Ted ^a   Marcoux, Pierre ^b  

^a TEFEN ^*  (United States)

^b IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MATRIX ALGEBRA; PRODUCTIVITY; WORK SIMPLIFICATION;

BEST KNOWN METHODS (BKM);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0034479154     PISSN: 10788743     EISSN: None     Source Type: Journal    
DOI: 10.1109/ASMC.2000.902583     Document Type: Article

References (0)