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Volumn 2, Issue , 2000, Pages 760-761
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Structural and loss characterization of sion layers for optical waveguide applications
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
HYDROGEN BONDS;
LIGHT ABSORPTION;
OPTICAL FILMS;
OPTICAL VARIABLES MEASUREMENT;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
REFRACTIVE INDEX;
SILICON COMPOUNDS;
BENDING VIBRATIONS;
OPTICAL LOSS MEASUREMENT;
SILICON OXYNITRIDE FILM;
STRETCHING VIBRATIONS;
OPTICAL WAVEGUIDES;
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EID: 0034478609
PISSN: 10928081
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (7)
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References (0)
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