Direct nanoprinting technology and its application to nanostructure fabrication

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

Volumn 2, Issue , 2000, Pages 417-418

  Yokoo, A ^a   Nakao, M ^a   Masuda, H ^a   Tamamura, T ^a  

^a NTT Basic Research Laboratories   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

NANOIMPRINT LITHOGRAPHY; NANOPRINTING;

ALUMINA; ATOMIC FORCE MICROSCOPY; DRY ETCHING; ELECTRON BEAM LITHOGRAPHY; GLASS TRANSITION; NANOTECHNOLOGY; NICKEL ALLOYS; OPTICAL RECORDING; POLYCARBONATES; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE;

NANOSTRUCTURED MATERIALS;

EID: 0034476714     PISSN: 10928081     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)