Anomalous device degradation of SOI devices with STI

IEEE International SOI Conference

Volumn , Issue , 2000, Pages 132-133

  Lee, Hyeokjae ^a   Lee, Jong Ho ^a   Kang, Dae Gwan ^a   Park, Young June ^a   Min, Hong Shick ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER MOBILITY; COMPUTER SIMULATION; DYNAMIC RANDOM ACCESS STORAGE; SILICON ON INSULATOR TECHNOLOGY; SURFACE ROUGHNESS; THRESHOLD VOLTAGE;

SHALLOW TRENCH ISOLATION (STI);

MOSFET DEVICES;

EID: 0034472899     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)